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Introduction

The mass flow meter (MFC) consists of three basic devices: flow sensor, flow-splitter bypass and printed circuit board, it accurately measures mass flow rates despites gas volume fluctuated due to temperature changes. The MFC is widely applied in the fields of semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting, vacuum system researching, etc.

 

Typical Application

The typical applications of MFC include microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma, etching, sputtering, ion implantation and other field such as vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.

 

Features

D07-7KM MFC has the advantages of high precision, long service life, excellent repeatability, quick response, soft-start, good reliability, wide operation pressure range(good operation in high pressure or vacuum situation), easy and convenient operation, etc. It can be installed wherever needed and connected with the computer to realize automatic control.

 

Specification

Ranges of Flow	(20,30,50,100,200,300,500) SCCM (0~1,2,3,5,10) SLM
Accuracy	±1.5%F.S
Linearity	±1%F.S
Repeatability	±0.2%F.S
Response-Time	=4 sec
Temperature Coefficient	Zero: =±0.1%F.S./?;Span: =±0.2%F.S./?
Max Pressure	3MPa
Operation Temperature	5?~45?
Sealing Material	Viton, Neoprene
Setting/Output Signal	0V~+5.00V (Input Impedance >100K,Output Current=3ma)
Power Supply	+15V   50mA -15V   50mA
Electrical Connection	D sub 15 pins Female
Differential Pressure	<0.01 MPa
Leak Rate	1×10-8atm•cc / sec He(1×10-9 Pa•m3 / sec He)
Standard Joint	SwagelokF8, SwagelokF6, SwagelokF3, Swagelok1/8”,f4(Inner)×1 Hose Coupler, VCR1/4”, Swagelok1/4”, f6(Inner)×1 Hose Coupler
Media	All Gas
Emi	CE
Weight	0.92kg

Installation Dimension