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Low temperature plasma is the fourth state of the material, which is followed by the solid, liquid and gaseous state. When the applied voltage reaches the ignition voltage of the gas, the gas molecules are breakdown, resulting in a mixture of electrons, ions, atoms and free radicals. Although the electron temperature is high, the heavy particle temperature is very low, and the whole system is in a low temperature state, so it is called low temperature plasma. Low temperature plasma degradation of pollutants is to use these high-energy electrons, free radicals and other active particles and the exhaust gas pollutants, molecular contaminants within a very short period of time the decomposition of, and subsequent reaction to achieve the purpose of pollutant degradation.