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Description of argon plasma treatment
Equipment Model: PR80L-S3
Machine weight: about 450KG
Power rating: 5KW
Machine power supply: AC-380V/three-phase five-wire
Specifications of argon plasma treatment: 1000mm(W)×960mm(D)×1720mm(H)
Vacuum chamber specifications: 500mm (W) × 400mm (D) × 400mm (H) can be customized according to the product
Electrode plate size: 490mm(W)×320mm(D), 6 layers, Pitch spacing: 60mm, any combination
The maximum single-treatment area: 440mm (W) × 305mm (D)
Bracket mode: custom aluminum bracket structure
Capacity of argon plasma treatment: According to product specifications
Processing time: different process, different processing time
Plasma generator power: RF 13.56MH z, 0-500W adjustable
Vacuum Pump System: Type 90 Mechanical Oil Rotary Vane Vacuum Pump
Vacuum Measurement System: Pirani Vacuum Gauge
Working vacuum degree: 20-60Pa
Vacuum pump limit pressure: 4.0×10-1Pa
Vacuum time: =60S
Breaking vacuum time: 20-60S
Gas supply method: solenoid valve type
Flowmeter adjustment range: 0-300Sccm (ml/min)
Input air pressure monitoring system: 2 air pressure decompression tables, 2 gas mass flow meters
Operation method: manually take and place the workpiece, start automatic control with a key
Using of argon plasma treatment:
different combinations for different process manufacturing, can be used for devices, metal-based workpieces, ceramics, glass and other workpiece surface cleaning, modification and so on.
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