Find high quality backing plates with competitive price here. Please rest assured to buy backing plates with Haohai Metal Materials Co., Ltd.

Backing Plates

Haohai Metal provides backing plates (copper, molybdenum, copper-chromium, titanium, molybdenum etc.) for planar, circular and cylindrical (rotary) sputtering targets, conductive pastes and pads for sputter target cooling, and also offer bonding services as part of our comprehensive range of services to the PVD community.

Our backing plates are from popular sputtering systems from OEMs, including Perkin-Elmer, MRC, and CVC etc. Our in-house machining capabilities allow us to manufacture a full range of backing plates to original equipment specifications or custom cathode dimensions.

Materials	Plate	Tube
Oxygen-free High Thermal Conductivity (OFHC) Copper	O	O
Molybdenum	O	O
Aluminum	O	O
Stainless Steel	O	O
Titanium	O	O
Standard Copper Backing Plate for RF Magnetron	O	O
Low-Carbon Iron & Copper Backing Plate for DC Magnetron	O	O
Enhanced Copper Backing Plate with Serpentine Water Cooling Track	O	X

  O - available, X - not available

OFHC Copper Backing Plates

Machined from oxygen-free, high-conductivity copper.

   - For regular, circular disc-type sputtering sources

   - Most sputter sources accept a 0.125" (1/8") thick target bonded to a 0.125" thick backing plate

   - For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250" (1/4") to suit most applications

NOTE:

   - Those identified in the chart by diameter and thickness only are plain discs without through or tapped holes.

   - They are suitable for most circular target sources from other manufacturers, although they may need minor machining for screw, clamps, etc.

   - Copper Cup Backing Plates available upon request.

Target Size	Materials	Price
2" Diameter x .125" thick	OFHC Copper	P.O.R
2" Diameter x .250" thick	OFHC Copper	P.O.R
3" Diameter x .125" thick	OFHC Copper	P.O.R
3" Diameter x .250" thick	OFHC Copper	P.O.R
4'' Diameter x .125" thick	OFHC Copper	P.O.R
4" Diameter x .250" thick	OFHC Copper	P.O.R
6" Diameter x .125" thick	OFHC Copper	P.O.R
6" Diameter x .250" thick	OFHC Copper	P.O.R
8" Diameter x .125" thick	OFHC Copper	P.O.R
8" Diameter x .250" thick	OFHC Copper	P.O.R

For more information about backing plates please call +86 3358 2330 or contact us online.